Title:
CONVEYANCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/235428
Kind Code:
A1
Abstract:
A conveyance device, according to the present invention, comprises a plate-shaped main body which is relative to a plate-shaped member, a plurality of recesses formed in the main body so as to face an outer peripheral portion of the plate-shaped member, a plurality of discharge paths formed inside the main body, and a plurality of restricting sections formed in the main body so as to restrict lateral movement of the plate-shaped member. Each of the plurality of recesses communicate with any of the plurality of discharge paths, and rotational flow is formed in the recesses by a fluid supplied from the discharge paths which communicate. Furthermore, each of the openings of the plurality of recesses are a portion of the opening and the portions which are not covered by the plate-shaped member are covered by any of the plurality of restricting sections.
Inventors:
IWASAKA HITOSHI (JP)
TANAKA HIDEMITSU (JP)
TOKUNAGA HIDEYUKI (JP)
KOSHIISHI KATSUHIRO (JP)
KASAI YUJI (JP)
IWASAKA NAONARI (JP)
TANAKA HIDEMITSU (JP)
TOKUNAGA HIDEYUKI (JP)
KOSHIISHI KATSUHIRO (JP)
KASAI YUJI (JP)
IWASAKA NAONARI (JP)
Application Number:
PCT/JP2021/018765
Publication Date:
November 25, 2021
Filing Date:
May 18, 2021
Export Citation:
Assignee:
HARMOTEC CO LTD (JP)
International Classes:
B65G49/07; B25J15/06; H01L21/677
Domestic Patent References:
| WO2013027828A1 | 2013-02-28 | |||
| WO2002012098A1 | 2002-02-14 |
Foreign References:
| US6322116B1 | 2001-11-27 | |||
| JPH0663254U | 1994-09-06 | |||
| JP2010258129A | 2010-11-11 | |||
| JP2000007149A | 2000-01-11 | |||
| JP2005051260A | 2005-02-24 |
Attorney, Agent or Firm:
ASAHI PATENT FIRM (JP)
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