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Patent Searching and Data


Title:
CONVEYANCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/235428
Kind Code:
A1
Abstract:
A conveyance device, according to the present invention, comprises a plate-shaped main body which is relative to a plate-shaped member, a plurality of recesses formed in the main body so as to face an outer peripheral portion of the plate-shaped member, a plurality of discharge paths formed inside the main body, and a plurality of restricting sections formed in the main body so as to restrict lateral movement of the plate-shaped member. Each of the plurality of recesses communicate with any of the plurality of discharge paths, and rotational flow is formed in the recesses by a fluid supplied from the discharge paths which communicate. Furthermore, each of the openings of the plurality of recesses are a portion of the opening and the portions which are not covered by the plate-shaped member are covered by any of the plurality of restricting sections.

Inventors:
IWASAKA Hitoshi (JP)
TANAKA Hidemitsu (JP)
TOKUNAGA Hideyuki (JP)
KOSHIISHI Katsuhiro (JP)
KASAI Yuji (JP)
IWASAKA Naonari (JP)
Application Number:
PCT/JP2021/018765
Publication Date:
November 25, 2021
Filing Date:
May 18, 2021
Export Citation:
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Assignee:
HARMOTEC CO., LTD. (JP)
International Classes:
B65G49/07; H01L21/677; B25J15/06
Attorney, Agent or Firm:
ASAHI PATENT FIRM (JP)
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