Title:
CRYOPUMP REGENERATION METHOD AND CRYOPUMP
Document Type and Number:
WIPO Patent Application WO/2023/176157
Kind Code:
A1
Abstract:
Provided is a regeneration method for a cryopump (10). The cryopump (10) comprises a cryopanel (18) and a cryopump container (16) accommodating the cryopanel (18). The method comprises raising the temperature of the cryopanel (18) from an extremely low temperature to a heating completion temperature, and completing regeneration of the cryopump (10) in a state in which the temperature of the cryopanel (18) has been raised to the heating completion temperature. Said completion comprises: repeatedly supplying a purge gas to the cryopump container (16), carrying out a rough evacuation of the cryopump container (16), and measuring the pressure increase rate inside the cryopump container (16) to obtain a history of the pressure increase rate; and determining whether to terminate the regeneration of the cryopump (10) on the basis of the obtained history of the pressure increase rate.
Inventors:
NAKAMURA MASATOSHI (JP)
YAGAWA YUUMA (JP)
YAGAWA YUUMA (JP)
Application Number:
PCT/JP2023/002220
Publication Date:
September 21, 2023
Filing Date:
January 25, 2023
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES (JP)
International Classes:
F04B37/08
Foreign References:
| JP2014173571A | 2014-09-22 | |||
| JP2019203508A | 2019-11-28 | |||
| JP2013181448A | 2013-09-12 |
Attorney, Agent or Firm:
MORISHITA Sakaki (JP)
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