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Title:
CRYOPUMP, CRYOPUMP SYSTEM, AND METHOD FOR STARTING OPERATION OF CRYOPUMP
Document Type and Number:
WIPO Patent Application WO/2021/085184
Kind Code:
A1
Abstract:
A cryopump (10) is provided with a non-flammable adsorbent material (64) and a controller (100) which performs, successively: in order to start a vacuum exhaust operation of the cryopump (10), dewatering the non-flammable adsorbent material (64) by exposing the non-flammable adsorbent material (64) to a dry atmosphere at room temperature or above; vacuum-exhausting an environment around the non-flammable adsorbent material (64) after the non-flammable adsorbent material (64) is dewatered; and cooling the non-flammable adsorbent material (64) to a cryogenic temperature in a vacuum atmosphere.

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JPH066942PROBLEM TO BE SOLVED: To manufacture a cryopump
Inventors:
YATSU TAKAHIRO (JP)
KIMURA TOSHIYUKI (JP)
Application Number:
PCT/JP2020/039093
Publication Date:
May 06, 2021
Filing Date:
October 16, 2020
Export Citation:
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Assignee:
SUMITOMO HEAVY INDUSTRIES (JP)
International Classes:
F04B37/08; B01D53/04; F04B37/16
Foreign References:
JP2013170568A2013-09-02
US5345787A1994-09-13
JPS51137674A1976-11-27
JPH1073078A1998-03-17
JPH03258976A1991-11-19
JP2013181448A2013-09-12
Attorney, Agent or Firm:
MORISHITA Sakaki (JP)
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