Title:
CRYSTAL, MULTILAYER STRUCTURE, ELECTRONIC DEVICE, ELECTRONIC INSTRUMENT, AND METHODS RESPECTIVELY FOR PRODUCING THESE PRODUCTS
Document Type and Number:
WIPO Patent Application WO/2023/145808
Kind Code:
A1
Abstract:
[Problem] To provide: a crystal having excellent shape memory properties and corrosion resistance; a multilayer structure, an electronic device and an electronic instrument each containing the crystal; and methods respectively for producing these products in an industrially advantageous manner. [Solution] At least an oxide film is formed on a crystal substrate, then an epitaxial film containing a crystalline compound is laminated on the oxide film, and then a second epitaxial film that has a different chemical composition from that in the aforementioned epitaxial film is laminated on the aforementioned epitaxial film directly or with another layer interposed therebetween. In this procedure, the lamination of the epitaxial film is performed by forming the epitaxial film using a compound element in the compound layer. In this manner, an epitaxial film containing a crystal showing a hyperelasticity of 10% or more is formed.
Inventors:
KIJIMA TAKESHI (JP)
Application Number:
PCT/JP2023/002399
Publication Date:
August 03, 2023
Filing Date:
January 26, 2023
Export Citation:
Assignee:
GAIANIXX INC (JP)
International Classes:
C23C14/08; C22C28/00; C30B29/16; H01L21/316; H10N30/05; H10N30/06; H10N30/076; H10N30/078; H10N30/20; H10N30/50; H10N30/853; H10N30/87
Foreign References:
| JP2019216181A | 2019-12-19 | |||
| JP2009158784A | 2009-07-16 | |||
| JP2004006960A | 2004-01-08 |
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