Title:
CRYSTAL OSCILLATOR AND MANUFACTURING METHOD AND APPARATUS THEREOF
Document Type and Number:
WIPO Patent Application WO/2020/191750
Kind Code:
A1
Abstract:
Provided are a crystal oscillator and a manufacturing method and apparatus thereof. The crystal oscillator comprises a silicon-based substrate (10) and a crystal oscillation unit (40). The silicon-based substrate (10) is provided with a cavity structure (101) allowing oscillation of the crystal oscillation unit (40). The crystal oscillation unit (40) is suspended above the cavity structure (101). The crystal oscillation unit (40) comprises a first excitation electrode (41), a crystal layer (43) and a second excitation electrode (42) stacked one above the other, thereby realizing a small-sized crystal oscillator, enhancing processing precision of the crystal oscillator, and solving the problem in the art in which a crystal oscillator has a large size and is unable to meet the compactness requirement of mobile terminals.
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Inventors:
WANG HONGCHAO (CN)
SHEN JIAN (CN)
WANG WENXUAN (CN)
LI YUNNING (CN)
SHEN JIAN (CN)
WANG WENXUAN (CN)
LI YUNNING (CN)
Application Number:
PCT/CN2019/080214
Publication Date:
October 01, 2020
Filing Date:
March 28, 2019
Export Citation:
Assignee:
SHENZHEN GOODIX TECH CO LTD (CN)
International Classes:
H03H3/02
Foreign References:
| CN102122939A | 2011-07-13 | |||
| US20060214745A1 | 2006-09-28 | |||
| CN101499784A | 2009-08-05 | |||
| CN104202010A | 2014-12-10 | |||
| CN103296992A | 2013-09-11 | |||
| CN101977026A | 2011-02-16 |
Attorney, Agent or Firm:
LEADER PATENT & TRADEMARK FIRM (CN)
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