Title:
CRYSTALLINE ALLOY HAVING GLASS FORMING ABILITY, PREPARATION METHOD THEREOF, ALLOY TARGET FOR SPUTTERING, AND PREPARATION METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2013/085237
Kind Code:
A1
Abstract:
The objective of the present invention is to provide a crystalline alloy having glass forming ability which has superior thermal stability for being amorphous while having glass forming ability, and a preparation method thereof. In addition, another objective of the present invention is to provide an alloy target for sputtering prepared using the crystalline alloy, and a preparation method thereof. According to one aspect of the present invention, provided is a crystalline alloy having glass forming ability, comprising three or more types of elements having glass forming ability, wherein the average grain size of the alloy is 0.1-5 μm, and the alloy comprises 5-20 atom% of Al, 15-40 atom% of Cu and/or Ni, and the remainder being Zr.
Inventors:
SHIN SEUNG-YONG (KR)
MOON KYOUNG-IL (KR)
SUN JU-HYUN (KR)
LEE CHANG-HUN (KR)
MOON KYOUNG-IL (KR)
SUN JU-HYUN (KR)
LEE CHANG-HUN (KR)
Application Number:
PCT/KR2012/010397
Publication Date:
June 13, 2013
Filing Date:
December 04, 2012
Export Citation:
Assignee:
KOREA IND TECH INST (KR)
International Classes:
C22C16/00; C23C14/34
Foreign References:
| KR100812943B1 | 2008-03-11 | |||
| US6231697B1 | 2001-05-15 | |||
| US6582538B1 | 2003-06-24 | |||
| US6306228B1 | 2001-10-23 |
Attorney, Agent or Firm:
LEE, In-Haeng et al. (KR)
이인행 (KR)
이인행 (KR)
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Claims: