Title:
CURABLE COMPOSITION FOR IMPRINTING, PATTERN FORMATION METHOD, AND PATTERN
Document Type and Number:
WIPO Patent Application WO/2012/147828
Kind Code:
A1
Abstract:
Provided is a curable composition for imprinting which has excellent pattern formation properties and heat resistance. A polymerizable compound (Ax-1) having a maleimide structure or a compound (Ax-2) having a partial structure represented by general formula (I) is blended in a curable composition for imprinting.
Inventors:
KODAMA KUNIHIKO (JP)
GOTO YUICHIRO (JP)
GOTO YUICHIRO (JP)
Application Number:
PCT/JP2012/061167
Publication Date:
November 01, 2012
Filing Date:
April 26, 2012
Export Citation:
Assignee:
FUJIFILM CORP (JP)
KODAMA KUNIHIKO (JP)
GOTO YUICHIRO (JP)
KODAMA KUNIHIKO (JP)
GOTO YUICHIRO (JP)
International Classes:
C08F22/40; C08F30/08; H01L21/027
Domestic Patent References:
| WO2010137724A1 | 2010-12-02 |
Foreign References:
| JP2010018753A | 2010-01-28 | |||
| JP2010031238A | 2010-02-12 | |||
| JP2008168480A | 2008-07-24 | |||
| JP2010067621A | 2010-03-25 | |||
| JP2009259370A | 2009-11-05 | |||
| JPH05313106A | 1993-11-26 | |||
| US3770768A | 1973-11-06 |
Attorney, Agent or Firm:
SIKs & Co. (JP)
Patent business corporation patent firm Sykes (JP)
Patent business corporation patent firm Sykes (JP)
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Claims: