Title:
CURABLE COMPOSITION FOR NANOIMPRINT, SEMICONDUCTOR ELEMENT, AND NANOIMPRINT METHOD
Document Type and Number:
WIPO Patent Application WO/2011/125800
Kind Code:
A1
Abstract:
Disclosed is a curable composition for nanoimprint, which contains (A) a polymerizable compound, (B) a fluorine atom-containing polymer and (C) a radical generator. It is preferable that the content of the fluorine atom-containing polymer (B) is 0.1-10 parts by mass (inclusive) relative to 100 parts by mass of the polymerizable compound (A). It is preferable that the weight average molecular weight of the fluorine atom-containing polymer (B) in terms of polystyrene as determined by gel permeation chromatography is 1,000-30,000 (inclusive). It is preferable that the fluorine atom-containing polymer (B) contains a polymer that has at least one structural unit selected from the group consisting of structural units represented by formula (B-1) and structural units represented by formula (B-2).
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Inventors:
OKAMOTO MASASHI (JP)
NISHIMURA YUKIO (JP)
NISHIMURA YUKIO (JP)
Application Number:
PCT/JP2011/058139
Publication Date:
October 13, 2011
Filing Date:
March 30, 2011
Export Citation:
Assignee:
JSR CORP (JP)
OKAMOTO MASASHI (JP)
NISHIMURA YUKIO (JP)
OKAMOTO MASASHI (JP)
NISHIMURA YUKIO (JP)
International Classes:
H01L21/027; B29C59/02; C08F2/44; C08F12/20; C08L101/04
Domestic Patent References:
| WO2008155928A1 | 2008-12-24 | |||
| WO2007116664A1 | 2007-10-18 | |||
| WO2006114958A1 | 2006-11-02 |
Foreign References:
| JP2007304537A | 2007-11-22 | |||
| JP2008088343A | 2008-04-17 | |||
| JP2010032994A | 2010-02-12 | |||
| JP2007001250A | 2007-01-11 | |||
| JP2010109092A | 2010-05-13 |
Attorney, Agent or Firm:
AMANO KAZUNORI (JP)
Kazuki Amano (JP)
Kazuki Amano (JP)
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Claims:
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