CURABLE COMPOSITION FOR TRANSFER MATERIAL AND UREA COMPOUND CONTAINING (METH)ACRYLOYL GROUP

Title:

CURABLE COMPOSITION FOR TRANSFER MATERIAL AND UREA COMPOUND CONTAINING (METH)ACRYLOYL GROUP

Document Type and Number:

WIPO Patent Application WO/2010/087318

Kind Code:

A1

Abstract:

Disclosed is a curable composition for a transfer material, which exhibits very good transferability in a nanoimprint process, while having a high selectivity between the dry etching rates by an argon gas and an oxygen gas. The curable composition for a transfer material is suitable for a nanoimprint process, and enables the formation of a fine pattern at a high throughput. Specifically, the curable composition for a transfer material is characterized by containing a compound (A) that has at least one skeleton selected from a group consisting of formulae (1)-(3), and a (meth)acryloyl group.

Inventors:

ARAI YOSHIKAZU (JP)
UCHIDA HIROSHI (JP)

Application Number:

PCT/JP2010/050936

Publication Date:

August 05, 2010

Filing Date:

January 26, 2010

Export Citation:

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Assignee:

SHOWA DENKO KK (JP)
ARAI YOSHIKAZU (JP)
UCHIDA HIROSHI (JP)

International Classes:

H01L21/027; B29C59/02; C07C275/10; G11B5/65; G11B5/84; G11B5/855; B29K61/20

Foreign References:

JP2008105414A	2008-05-08
JP2008242093A	2008-10-09
JPH05100424A	1993-04-23
JP2006063318A	2006-03-09
JPS50648B1	1975-01-10
JP2007055993A	2007-03-08
JP2002012665A	2002-01-15
JP2003277723A	2003-10-02
JP2003100609A	2003-04-04
JP2005277280A	2005-10-06
JP2007072374A	2007-03-22
JP2003287889A	2003-10-10
JP2007273067A	2007-10-18

Other References: