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Title:
CUTTING DEVICE, AND METHOD FOR MANUFACTURING CUT PRODUCT
Document Type and Number:
WIPO Patent Application WO/2023/112464
Kind Code:
A1
Abstract:
This cutting device comprises a table, a cutting mechanism, a holding mechanism, and a water isolation/discharge mechanism. The table or the holding mechanism is connected to a dry vacuum pump through a suction path. The water isolation/discharge mechanism is positioned on the suction path and discharges water through a water discharge path. The water isolation/discharge mechanism includes a first tank, a second tank, and a valve mechanism. The first tank includes a partition plate for partitioning the tank into a region where a connection opening leading to the vacuum pump is positioned and a region where a connection opening leading to the table or the holding mechanism is positioned. A space is formed in the first tank above the partition plate. The valve mechanism changes between a first state, in which water flowing from the first tank into the second tank is reserved in the second tank, and a second state, in which water is reserved in the first tank and the water reserved in the second tank is discharged.

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Inventors:
IGUCHI HARUKI (JP)
HOSOMI TAKAYA (JP)
SAKAMOTO RIN (JP)
Application Number:
PCT/JP2022/038572
Publication Date:
June 22, 2023
Filing Date:
October 17, 2022
Export Citation:
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Assignee:
TOWA CORP (JP)
International Classes:
B23Q3/08; B24B27/06; B24B41/06; B24B55/06; B28D1/24; B28D7/02; B28D7/04; H01L21/301
Foreign References:
CN209868312U2019-12-31
JP2019051645A2019-04-04
US6241226B12001-06-05
JP2009028881A2009-02-12
JP2011104726A2011-06-02
JP2021072396A2021-05-06
Attorney, Agent or Firm:
FUJIWARA Satoshi et al. (JP)
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