Title:
CYCLOOCTATETRAENETRICARBONYLRUTHENIUM COMPLEX, PROCESS FOR PRODUCING SAME, AND PROCESS FOR PRODUCING FILM USING THE COMPLEX AS RAW MATERIAL
Document Type and Number:
WIPO Patent Application WO/2010/087217
Kind Code:
A1
Abstract:
A ruthenium compound which is suitable for chemical vapor deposition (CVD).
A solution of a mixture of dodecacarbonyltriruthenium and a cyclooctatetraene compound is irradiated with light to thereby obtain a liquid cyclooctatetraenetricarbonylruthenium complex of formula (1).
A satisfactory ruthenium film or ruthenium oxide film can be easily obtained by chemical vapor deposition using the complex as a raw material.
Inventors:
SUZUKI KAZUHARU (JP)
SAITO MASAYUKI (JP)
SAITO MASAYUKI (JP)
Application Number:
PCT/JP2010/050127
Publication Date:
August 05, 2010
Filing Date:
January 08, 2010
Export Citation:
Assignee:
TANAKA HOLDINGS CO LTD (JP)
SUZUKI KAZUHARU (JP)
SAITO MASAYUKI (JP)
SUZUKI KAZUHARU (JP)
SAITO MASAYUKI (JP)
International Classes:
C07F15/00; C23C16/18; C23C16/40; H01L21/28; H01L21/285; C07C13/267
Foreign References:
| JP2002201162A | 2002-07-16 | |||
| JP2002212112A | 2002-07-31 | |||
| JP2002201162A | 2002-07-16 | |||
| JP2002212112A | 2002-07-31 | |||
| JP2005060814A | 2005-03-10 |
Other References:
NEIL G. CONNELLY ET AL.: "STEREO- AND REGIO-SPECIFIC C-C BOND FORMATION VIA THE COUPLING OF ELECTROPHILIC AND NUCLEOPHILIC ORGANOTRANSITION -METAL COMPLEXES: THE X-RAY CRYSTAL STRUCTURE OF [Ru (CO) 2 (PPh3) (h2,h3-C8H8R) ] [PF6] .0.5CH2C12 (R=CH2C(Me)=CH2)", JOURNAL OF ORGANOMETALLIC CHEMISTRY, vol. 299, 1986, pages C51 - C55
H. LI ET AL., JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 154, 2007, pages D642 - D647
H. LI ET AL., THE OPEN INORGANIC CHEMISTRY JOURNAL, vol. 2, 2008, pages 11 - 17
A.C. COPE ET AL., JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, vol. 74, 1952, pages 168
A.C. COPE ET AL., JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, vol. 74, 1952, pages 173
L.A. PAQUETTE ET AL., JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, vol. 91, 1969, pages 4714
A.C. COPE ET AL., JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, vol. 74, 1952, pages 175
H. LI ET AL., JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 154, 2007, pages D642 - D647
H. LI ET AL., THE OPEN INORGANIC CHEMISTRY JOURNAL, vol. 2, 2008, pages 11 - 17
A.C. COPE ET AL., JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, vol. 74, 1952, pages 168
A.C. COPE ET AL., JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, vol. 74, 1952, pages 173
L.A. PAQUETTE ET AL., JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, vol. 91, 1969, pages 4714
A.C. COPE ET AL., JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, vol. 74, 1952, pages 175
Attorney, Agent or Firm:
KOHNO Naotaka et al. (JP)
Naotaka Kono (JP)
Naotaka Kono (JP)
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