DATA GENERATION METHOD, CLOUD SYSTEM, PROCESSING DEVICE, COMPUTER PROGRAM, AND RECORDING MEDIUM

WIPO Patent Application WO/2023/073833

A1

This data generation method is a data generation method for generating control data for controlling a processing device that can perform removal processing on an object by radiating a pulse energy beam onto the object, wherein: after the pulse energy beam is radiated onto a test workpiece, the shape of the test workpiece after the removal processing is measured; information relating to the length of light penetration into the test workpiece is calculated on the basis of shape information for the test workpiece before the removal processing and measurement results on the shape of the test workpiece after the removal processing; a unit processing quantity of the object for a case in which the pulse energy beam is radiated onto the object for a single iteration is calculated, on the basis of information related to inclination with respect to the direction of radiation of the pulse energy beam at irradiation target positions on the object to be irradiated with the pulse energy beam and the information relating to the length of light penetration, for each of the irradiation target positions; and a target number of iterations the pulse energy beam is to be radiated is calculated for each of the irradiation target positions on the basis of a target processing quantity for each of the irradiation target positions and the unit processing quantity for each of the irradiation target positions.

EGAMI SHIGEKI (JP)
KITA NAONORI (JP)
TATSUZAKI YOSUKE (JP)

PCT/JP2021/039660

May 04, 2023

October 27, 2021

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NIKON CORP (JP)

B23K26/36

WO2015016254A1	2015-02-05
WO2015151540A1	2015-10-08

JP2009532213A	2009-09-10
JP2021511216A	2021-05-06
JP2012094591A	2012-05-17
JP2017185518A	2017-10-12

EGAMI, Tatsuo (JP)

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