Title:
DEBRIS TRAP DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURCE EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2016/006162
Kind Code:
A1
Abstract:
Disclosed are a debris trap device equipped with a rotary foil trap and cover member and capable of trapping debris stably with minimal defects in the rotary foil trap, and extreme ultraviolet light source equipment including the debris trap device. The debris trap (13) comprises: a rotatable foil trap (30) having a plurality of foils (31) disposed near plasma emitting extreme ultraviolet light, said rotatable foil trap (30) allowing the extreme ultraviolet light to pass therethrough while trapping debris generated from the plasma; a cover member (35) which surrounds the outer periphery of the foil trap (30) and collects the debris; and a debris discharge tube (37) for discharging the debris collected by the cover member (35) outside the cover member (35). The debris trap (13) is provided with a blockage detector for detecting blockage of the debris discharge tube (37) due to the debris.
Inventors:
YABUTA HIRONOBU (JP)
Application Number:
PCT/JP2015/002875
Publication Date:
January 14, 2016
Filing Date:
June 09, 2015
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
G03F7/20; H01L21/027; H05G2/00
Domestic Patent References:
| WO2010147214A1 | 2010-12-23 |
Foreign References:
| JP2013004369A | 2013-01-07 | |||
| JP2011514648A | 2011-05-06 | |||
| JP2007194590A | 2007-08-02 | |||
| JP2006032980A | 2006-02-02 |
Attorney, Agent or Firm:
KONISHI, Kay et al. (JP)
Megumi Konishi (JP)
Megumi Konishi (JP)
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