Title:
DEEP DIELECTRIC CHARGING AND DISCHARGING TEST DEVICE AND METHOD UNDER ELECTRON RADIATION
Document Type and Number:
WIPO Patent Application WO/2024/092865
Kind Code:
A1
Abstract:
An efficient deep dielectric charging and discharging test device and method under electron radiation. The test device comprises an electron gun (1) located in a vacuum tank and used as a radiation source for an electron radiation test; a vacuum pump (2) used for vacuumizing the vacuum tank; a discharge signal lead-out wire (4) led out from the vacuum tank, connected to the bottom of a sample and an oscilloscope (3), and used as a transmission line of a sample discharge signal; and a sample platform (5) used for placing a sample under test. The test device can simultaneously carry out dielectric electrostatic discharge test under electron radiation on multiple types of samples under multiple electron energy levels and multiple electron beam current levels in a vacuum environment, so that the test time is greatly saved. The test device is simple, convenient and reliable to operate, can test at most 12 samples at a time, and can independently and effectively capture and record discharge waveform data of each sample, so that the test efficiency is greatly improved. The present invention provides more efficient test device and test scheme for the dielectric charging and discharging test research under electron irradiation.
Inventors:
SHANG PENGHUI (CN)
MA XUEJUAN (CN)
MA XUEJUAN (CN)
Application Number:
PCT/CN2022/131095
Publication Date:
May 10, 2024
Filing Date:
November 10, 2022
Export Citation:
Assignee:
YANGTZE DELTA REGION INSTITUTE OF UNIV OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA HUZHOU (CN)
International Classes:
G01R31/12
Foreign References:
| CN104237684A | 2014-12-24 | |||
| CN103760181A | 2014-04-30 | |||
| CN103267903A | 2013-08-28 | |||
| CN102507990A | 2012-06-20 | |||
| CN108063842A | 2018-05-22 | |||
| CN109142924A | 2019-01-04 | |||
| CN114778657A | 2022-07-22 | |||
| JP2019110055A | 2019-07-04 | |||
| JPH03107780A | 1991-05-08 |
Attorney, Agent or Firm:
SCIHEAD IP LAW FIRM (CN)
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