Title:
DEEP LEARNING-BASED PRECISE TEMPERATURE CONTROL SYSTEM FOR SEMICONDUCTOR CHEMICAL SOLUTION
Document Type and Number:
WIPO Patent Application WO/2023/163283
Kind Code:
A1
Abstract:
The present invention relates to a precise temperature control system used in a semiconductor central chemical supply system (C.C.S.S). According to one aspect of the present invention, a chemical solution temperature control system for controlling a temperature of a chemical solution used in a semiconductor manufacturing process is provided, and the system comprises: a heat exchanger module for heating or cooling a chemical solution supplied from a chemical solution tank; a control module for performing cooling or heating control of the heat exchanger module; and a deep learning-based temperature prediction module for predicting a discharge temperature of the chemical solution discharged from the heat exchanger module, wherein the heat exchanger module includes a plurality of unit heat exchangers, and each of the plurality of unit heat exchangers is individually controlled by the deep learning-based temperature prediction module.
Inventors:
JOO JEONG SEOP (KR)
KANG JEONG HO (KR)
YANG JEONG IN (KR)
JANG HYEON HO (KR)
NOH JI WON (KR)
KANG JEONG HO (KR)
YANG JEONG IN (KR)
JANG HYEON HO (KR)
NOH JI WON (KR)
Application Number:
PCT/KR2022/005836
Publication Date:
August 31, 2023
Filing Date:
April 25, 2022
Export Citation:
Assignee:
ARCHTRIA CO LTD (KR)
International Classes:
H01L21/67; F25B21/02; G06N3/08
Foreign References:
| KR20210082402A | 2021-07-05 | |||
| KR20200120958A | 2020-10-22 | |||
| KR20210000731A | 2021-01-05 | |||
| KR20020050015A | 2002-06-26 | |||
| JP2008064382A | 2008-03-21 |
Attorney, Agent or Firm:
LEE, Choong Han (KR)
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