Title:
DEFECT CLASSIFICATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/176132
Kind Code:
A1
Abstract:
The present invention accurately classifies defect patterns generated in an object to be inspected. Specifically, an automatic defect classification device 1 classifies defect patterns P generated in the object W to be inspected. The automatic defect classification device 1 comprises: a plurality of defect classification units 10 that classify the defect patterns P to obtain primary classification results R; a defect re-classification unit 20 that re-classifies the defect patterns P on the basis of the plurality of primary classification results R obtained by the plurality of defect classification units 10, to obtain a re-classification result T; and a re-classification registration unit 30 that registers a re-classification condition V according to the defect re-classification unit 20.
Inventors:
OHMI HIDEKAZU (JP)
Application Number:
PCT/JP2023/001413
Publication Date:
September 21, 2023
Filing Date:
January 18, 2023
Export Citation:
Assignee:
TORAY ENG CO LTD (JP)
TASMIT INC (JP)
TASMIT INC (JP)
International Classes:
H01L21/66; G01N21/956; G06T7/00; G06V10/70
Domestic Patent References:
| WO2021090601A1 | 2021-05-14 |
Foreign References:
| JP2012181209A | 2012-09-20 | |||
| JP2020187657A | 2020-11-19 | |||
| JP2021021670A | 2021-02-18 | |||
| JP2019124591A | 2019-07-25 | |||
| JP2014228496A | 2014-12-08 | |||
| JP2008082821A | 2008-04-10 | |||
| JP2022055953A | 2022-04-08 |
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