Title:
DEFECT INSPECTION METHOD FOR INSPECTION OBJECT
Document Type and Number:
WIPO Patent Application WO/2021/187767
Kind Code:
A1
Abstract:
A camera unit photographs a learning object positioned on a stage unit to obtain an image of the learning object, configures a defect type on the basis of the image of the learning object and a feature element for learning of a defect, and configures a relationship between the feature element for learning of the defect and the defect type, through a deep learning scheme. Thereafter, an inspection object is positioned on the stage unit, and the camera unit is used to secure a position coordinate value of the camera unit with respect to the inspection object. Subsequently, the camera unit is moved on the basis of the position coordinate value, the moved camera unit is used to photograph the inspection object positioned on the stage unit, so as to obtain an image of the inspection object, and a feature element of a defect with respect to the inspection object is calculated from the image of the inspection object. Then, on the basis of the calculated feature element of the defect, defects are classified according to defect types from the relationship between the feature element for learning of the defect and the defect type.
Inventors:
LEE YONG SOO (KR)
PARK SUN WOO (KR)
LEE WON HEE (KR)
JUNG YUN KYO (KR)
KIM GI DEOK (KR)
PARK SUN WOO (KR)
LEE WON HEE (KR)
JUNG YUN KYO (KR)
KIM GI DEOK (KR)
Application Number:
PCT/KR2021/002398
Publication Date:
September 23, 2021
Filing Date:
February 25, 2021
Export Citation:
Assignee:
KOMICO LTD (KR)
International Classes:
G01N21/88; G01N21/84; G06T7/00
Foreign References:
| JP2019190978A | 2019-10-31 | |||
| JP2019158501A | 2019-09-19 | |||
| KR20120109184A | 2012-10-08 | |||
| KR20130055932A | 2013-05-29 | |||
| JP2000057349A | 2000-02-25 |
Attorney, Agent or Firm:
LEE, Dong Gun (KR)
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