Title:
DEFECT OBSERVATION METHOD AND DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/159641
Kind Code:
A1
Abstract:
The purpose of the present invention is to reveal minute defects that conventionally were buried in roughness scattered light and were undetectable and enable positioning such that a minute defect of an observation subject reliably enters into the observation field of view of an SEM, or the like. An observation device provided with a dark-field microscope, a scanning electron microscope (SEM), and a control unit, wherein the dark-field microscope is configured so as to be provided with an illumination light source for irradiating illumination light onto a sample, an objective lens for condensing scattered light emitted from the sample irradiated with illumination light by the illumination light source, a waveplate for converting the polarization direction of scattered light from the sample that has been condensed by the objective lens, a filter for blocking a portion of the scattered light that has passed through the waveplate and allowing the remaining portion to pass, an imaging lens for focusing the scattered light that has passed through the filter, and a detector for dividing the image of the scattered light focused by the imaging lens into the polarization directions converted by the waveplate and detecting the resulting images, and the control unit is configured so as to have a calculation unit for determining the position of a defect candidate detected by another inspection device using the plurality of images separated into polarization directions and detected by the detector.
Inventors:
MINEKAWA YOHEI (JP)
OTANI YUKO (JP)
TAKAGI YUJI (JP)
OTANI YUKO (JP)
TAKAGI YUJI (JP)
Application Number:
PCT/JP2015/058233
Publication Date:
October 22, 2015
Filing Date:
March 19, 2015
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01N21/956; G01B11/30
Foreign References:
| JP2012026733A | 2012-02-09 | |||
| JP2009042040A | 2009-02-26 | |||
| JP2012117852A | 2012-06-21 | |||
| JPH0961367A | 1997-03-07 | |||
| JP2011106974A | 2011-06-02 |
Attorney, Agent or Firm:
SEIRYO I. P. C. (JP)
青稜 patent business corporation (JP)
青稜 patent business corporation (JP)
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