Title:
DEPOSITION APPARATUS AND DEPOSITION METHOD USING SAME
Document Type and Number:
WIPO Patent Application WO/2023/249244
Kind Code:
A1
Abstract:
Provided are a deposition apparatus and a deposition method using same. The deposition apparatus comprises: a mask including deposition openings; a mask frame supporting the mask, including a first portion, a second portion, a third portion, and a fourth portion, and including openings surrounded by the first portion, the second portion, the third portion, and the fourth portion and overlapping the deposition openings; a stage disposed on a rear surface of the mask frame; a pin part connected to the stage; and a magnet part disposed on a rear surface of the stage and overlapping the mask frame. Each of the first portion and the second portion of the mask frame extends along a first direction, each of the third portion and the fourth portion of the mask frame extends along a second direction crossing the first direction, and the pin part supports a side surface of the first portion of the mask frame and may move along the second direction.
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Inventors:
HONG JAEMIN (KR)
KIM HYOUNGWOOK (KR)
LEE SEONGCHEOL (KR)
KIM HYOUNGWOOK (KR)
LEE SEONGCHEOL (KR)
Application Number:
PCT/KR2023/005948
Publication Date:
December 28, 2023
Filing Date:
May 02, 2023
Export Citation:
Assignee:
SAMSUNG DISPLAY CO LTD (KR)
International Classes:
H10K71/00; C23C14/04; C23C14/24; H10K71/16
Foreign References:
| KR102359244B1 | 2022-02-08 | |||
| JP2013204129A | 2013-10-07 | |||
| KR20140074614A | 2014-06-18 | |||
| CN113140592A | 2021-07-20 | |||
| KR20210094198A | 2021-07-29 |
Attorney, Agent or Firm:
KORYO IP & LAW (KR)
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