Title:
DEPOSITION OF PIEZOELECTRIC FILMS
Document Type and Number:
WIPO Patent Application WO/2022/151472
Kind Code:
A1
Abstract:
A piezoelectric device comprises: a substrate (12) and a lead magnesium niobate-lead titanate (PMNPT) piezoelectric film on the substrate (12). The PMNPT film comprises: a thermal oxide layer (20) on the substrate (12); a first electrode above on the thermal oxide layer (20); a seed layer (26) above the first electrode; a lead magnesium niobate-lead titanate (PMNPT) piezoelectric layer (16) on the seed layer (26), and a second electrode on the PMNPT piezoelectric layer (16). The PMNPT film comprises a piezoelectric coefficient (d33) of greater than or equal to 200 pm/V.
Inventors:
SHARMA VIJAY BHAN (IN)
XUE YUAN (CN)
SANGLE ABHIJEET LAXMAN (IN)
RAMAKRISHNAN BHARATWAJ (US)
YANG YI (CN)
SETH SURESH CHAND (IN)
KADAM ANKUR ANANT (IN)
XUE YUAN (CN)
SANGLE ABHIJEET LAXMAN (IN)
RAMAKRISHNAN BHARATWAJ (US)
YANG YI (CN)
SETH SURESH CHAND (IN)
KADAM ANKUR ANANT (IN)
Application Number:
PCT/CN2021/072459
Publication Date:
July 21, 2022
Filing Date:
January 18, 2021
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
XUE YUAN (CN)
XUE YUAN (CN)
International Classes:
H01L41/277; C23C14/08; C23C14/35; H01L41/187; H01L41/316
Domestic Patent References:
| WO2021096884A1 | 2021-05-20 | |||
| WO2021096867A1 | 2021-05-20 |
Foreign References:
| CN112864304A | 2021-05-28 | |||
| CN112853286A | 2021-05-28 | |||
| CN101892522A | 2010-11-24 | |||
| US20080062228A1 | 2008-03-13 | |||
| CN101956166A | 2011-01-26 | |||
| GB2548377A | 2017-09-20 |
Attorney, Agent or Firm:
LECOME INTELLECTUAL PROPERTY AGENT LTD. (CN)
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