Title:
DESIGN SUPPORTING DEVICE AND DESIGN SUPPORTING METHOD
Document Type and Number:
WIPO Patent Application WO/2023/171116
Kind Code:
A1
Abstract:
The present invention is characterized by including: a defect providing unit (132) that sets a defect to a shape model of a structure in order to support structure design in consideration of inspection; an inspection signal calculation unit (134) that uses a sensor unit setting condition as a predetermined condition as a basis to virtually set a sensor unit for inspecting the set defect to the shape model and, for a plurality of defect properties, performs inspection simulation of the defect by the sensor unit virtually set; a detection probability calculation unit (135) that calculates a defect detection probability, which is a probability of detecting the defect; and a shape correction unit (142) that corrects the shape model on the basis of the defect detection probability.
Inventors:
KITAOKA MASANORI (JP)
MIZOTA HIROHISA (JP)
MIZOTA HIROHISA (JP)
Application Number:
PCT/JP2023/000484
Publication Date:
September 14, 2023
Filing Date:
January 11, 2023
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
G06F30/10; G06F30/23
Foreign References:
| JPH11175577A | 1999-07-02 | |||
| JP2010281786A | 2010-12-16 | |||
| JP2020135158A | 2020-08-31 |
Attorney, Agent or Firm:
ISONO INTERNATIONAL PATENT OFFICE, P.C. (JP)
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