Title:
DETECTING ELEMENT AND METHOD FOR MANUFACTURING SAME, AND DETECTING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2022/203057
Kind Code:
A1
Abstract:
This detecting element comprises a substrate 10, a piezoelectric film 14 provided on the substrate, a lower electrode 12 and an upper electrode 16 opposing one another across at least a portion of the piezoelectric film, an insertion film 28 comprising a thin film portion 28b that is provided between the lower electrode and the upper electrode in a resonance region 50 defined by a region in which the lower electrode and the upper electrode face one another sandwiching at least a portion of the piezoelectric film, and that is provided inward of the resonance region in a plan view, and a thick film portion 28a which surrounds the thin film portion in a plan view, is provided in a peripheral edge of the resonance region, and is thicker than the thin film portion, and a sensitive film 24 provided in a region surrounded by a first step 23 which is provided on an upper surface of the upper electrode and which is defined by the thin film portion and the thick film portion, wherein a resonant frequency changes in accordance with a change in environment.
Inventors:
SAKASHITA TAKESHI (JP)
Application Number:
PCT/JP2022/014522
Publication Date:
September 29, 2022
Filing Date:
March 25, 2022
Export Citation:
Assignee:
TAIYO YUDEN KK (JP)
International Classes:
G01N5/02; H01L41/047; H01L41/107; H01L41/187; H01L41/29; H03H3/02; H03H9/17
Foreign References:
| JP2018115927A | 2018-07-26 | |||
| JP2005533265A | 2005-11-04 | |||
| JP2015119249A | 2015-06-25 | |||
| JP2020178187A | 2020-10-29 |
Attorney, Agent or Firm:
KATAYAMA, Shuhei (JP)
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