Title:
DEVICE FOR ANALYSING PHYSICAL AND/OR CHEMICAL PROPERTIES OF THE SURFACE LAYER OF A SOLID BODY (VARIANTS)
Document Type and Number:
WIPO Patent Application WO/2004/025276
Kind Code:
A1
Abstract:
The inventive device comprises a unit for forming atomic and/or molecular and/or ion and/ or electron and/ or photon beams which are used for performing an action on the surface layer of a sample. The output bus of said forming unit connected to a recording system and containing means for producing unit impulses of said beams is introduced into a vacuum chamber. The device also comprises an electric discharge initiator provided with an electrode introduced into said vacuum chamber and a timer. A high pressure sensor connected to the vacuum chamber, an additional reservoir for cooling agent arranged in the vacuum chamber, and an analysing means which is disposed between a recording means and the sample and used for recording the spectra of energy quanta emitted by the surface layer of a solid body. Said invention improves the accuracy and informativenes of measurement results.
Inventors:
KALACHEV ALEXEI ALEXANDROVICH (RU)
BLASHENKOV NIKOLAI MIKHAILOVIC (RU)
IVANOV YURY PETROVICH (RU)
KOVALSKY VLADIMIR ANTONOVICH (RU)
MYASNIKOV ALEXANDR LVOVICH (RU)
MYASNIKOVA LYUBOV PETROVNA (RU)
BLASHENKOV NIKOLAI MIKHAILOVIC (RU)
IVANOV YURY PETROVICH (RU)
KOVALSKY VLADIMIR ANTONOVICH (RU)
MYASNIKOV ALEXANDR LVOVICH (RU)
MYASNIKOVA LYUBOV PETROVNA (RU)
Application Number:
PCT/RU2003/000312
Publication Date:
March 25, 2004
Filing Date:
July 15, 2003
Export Citation:
Assignee:
KALACHEV ALEXEI ALEXANDROVICH (RU)
BLASHENKOV NIKOLAI MIKHAILOVIC (RU)
IVANOV YURY PETROVICH (RU)
KOVALSKY VLADIMIR ANTONOVICH (RU)
MYASNIKOV ALEXANDR LVOVICH (RU)
MYASNIKOVA LYUBOV PETROVNA (RU)
BLASHENKOV NIKOLAI MIKHAILOVIC (RU)
IVANOV YURY PETROVICH (RU)
KOVALSKY VLADIMIR ANTONOVICH (RU)
MYASNIKOV ALEXANDR LVOVICH (RU)
MYASNIKOVA LYUBOV PETROVNA (RU)
International Classes:
G01N21/00; H01J37/252; G01N1/32; (IPC1-7): G01N13/00; G01N21/00
Foreign References:
| SU1807381A1 | ||||
| RU2086037C1 | 1997-07-27 | |||
| US5705821A | 1998-01-06 | |||
| JPH11295247A | 1999-10-29 |
Attorney, Agent or Firm:
Sandigursky, Oleg Lvovich (St.Petersburg, RU)
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