Title:
DEVICE FOR CLASSIFYING DEFECTS AND METHOD FOR ADJUSTING CLASSIFICATION
Document Type and Number:
WIPO Patent Application WO/2011/010557
Kind Code:
A1
Abstract:
Disclosed is a technique wherein an object that requires adjustment in order to increase the reliability of automatic classification can be easily identified.
A device (140) for adjusting classification classifies defects into a first class group according to the feature amount of the defects that are obtained from image data obtained from an electron microscope (110), and classifies the defects into a second class group according to the feature amount of the defects classified into the first class group. And, the device (140) for adjusting the classification calculates classification performance by comparing the defects that have been classified into the second class group with defects which should be classified into the second class group, and outputs the calculated classification performance in a predetermined display format to an output unit (180).
Inventors:
ONO MAKOTO (JP)
MINEKAWA YOHEI (JP)
KONISHI JUNKO (JP)
HIRAI TAKEHIRO (JP)
ISOMAE YUYA (JP)
MINEKAWA YOHEI (JP)
KONISHI JUNKO (JP)
HIRAI TAKEHIRO (JP)
ISOMAE YUYA (JP)
Application Number:
PCT/JP2010/061581
Publication Date:
January 27, 2011
Filing Date:
July 08, 2010
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
ONO MAKOTO (JP)
MINEKAWA YOHEI (JP)
KONISHI JUNKO (JP)
HIRAI TAKEHIRO (JP)
ISOMAE YUYA (JP)
ONO MAKOTO (JP)
MINEKAWA YOHEI (JP)
KONISHI JUNKO (JP)
HIRAI TAKEHIRO (JP)
ISOMAE YUYA (JP)
International Classes:
G01N23/225; G06T1/00; G06T7/00; H01L21/66
Foreign References:
| JP2004294360A | 2004-10-21 | |||
| JP2004077165A | 2004-03-11 | |||
| JP2004085503A | 2004-03-18 | |||
| JP2009103508A | 2009-05-14 |
Attorney, Agent or Firm:
Shoyo Intellectual Property Firm (JP)
Patent business corporation SHOYO Intellectual Property Firm (JP)
Patent business corporation SHOYO Intellectual Property Firm (JP)
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