Title:
DEVICE FOR ESTIMATING SHAPE OF FIGURE PATTERN
Document Type and Number:
WIPO Patent Application WO/2018/230476
Kind Code:
A1
Abstract:
According to the present invention, the shape of a real figure pattern formed on a real substrate is estimated by simulating a lithography process. An evaluation point (E) is set on a contour of an original figure pattern (10) included in an original image (Q1). A filtering process (convolution) and a contraction process (pulling) for contracting an image are alternately performed on the original image (Q1), and an image pyramid (PP) is created which is formed from n sets of layered images (P1~Pn) having different image sizes. For each of the layered images (P1 to Pn), feature amounts (x1 to xn) are extracted on the basis of pixel values of pixels around the evaluation point (E), and the extracted feature amounts are provided to an estimation calculation unit (132). A neural network in the estimation calculation unit (132) performs calculations for an intermediate layer by using the feature amounts (x1 to xn) as values of an input layer, and outputs, as values of an output layer, an estimation value (y) of a process bias that indicates a deviation amount between a location of the evaluation point (E) on the original figure pattern (10) and that on the real figure pattern.
Inventors:
SHIMOMURA TAKEYA (JP)
OOKAWA YOUHEI (JP)
WATANABE SATOSHI (JP)
OOKAWA YOUHEI (JP)
WATANABE SATOSHI (JP)
Application Number:
PCT/JP2018/022100
Publication Date:
December 20, 2018
Filing Date:
June 08, 2018
Export Citation:
Assignee:
DAINIPPON PRINTING CO LTD (JP)
International Classes:
G03F1/36; G03F1/70; G06F17/50; H01L21/3065
Foreign References:
| JP2003151885A | 2003-05-23 | |||
| JP2011065111A | 2011-03-31 | |||
| JP2010199159A | 2010-09-09 | |||
| JP2013182962A | 2013-09-12 | |||
| JP2013251484A | 2013-12-12 | |||
| JP2006032480A | 2006-02-02 | |||
| JPH118187A | 1999-01-12 | |||
| JPH06104163A | 1994-04-15 | |||
| JPH10144684A | 1998-05-29 | |||
| JPH08195339A | 1996-07-30 | |||
| JP2004294977A | 2004-10-21 | |||
| JP2013057848A | 2013-03-28 | |||
| JP2006171113A | 2006-06-29 | |||
| JP2010066460A | 2010-03-25 |
Attorney, Agent or Firm:
SHIMURA Hiroshi (JP)
Download PDF:
Previous Patent: ANTENNA MODULE AND COMMUNICATION DEVICE
Next Patent: CRYOPRESERVATION JIG FOR CRYOPRESERVING CELLS OR TISSUES
Next Patent: CRYOPRESERVATION JIG FOR CRYOPRESERVING CELLS OR TISSUES