Title:
DEVICE FOR GENERATING MICROWAVE PLASMA AND METHOD OF MAKING DIAMOND FILM UTILIZING SAID DEVICE
Document Type and Number:
WIPO Patent Application WO/1992/005867
Kind Code:
A1
Abstract:
A device for generating mirowave plasma which emits microwaves to an electric discharge space in order to stably generate plasma covering a wide range at a fixed position for a long time, characterized by being provided with a plurality of microwave emitting means to continuously emit microwave pulses at different timings in emitting microwave pulses; and a method of making diamond film characterized by synthesizing diamond thin film utilizing said microwave plasma generating device for efficiently forming diamond thin film uniform in thickness on a wide-area substrate; thereby capable of providing a useful microwave generating device and diamond thin film.
Inventors:
ITATANI RYOHEI (JP)
ISOZAKI TOSHIO (JP)
HAYASHI NARIYUKI (JP)
ISOZAKI TOSHIO (JP)
HAYASHI NARIYUKI (JP)
Application Number:
PCT/JP1991/001318
Publication Date:
April 16, 1992
Filing Date:
October 01, 1991
Export Citation:
Assignee:
IDEMITSU PETROCHEMICAL CO (JP)
International Classes:
B01J12/00; B01J19/08; B01J19/12; C23C16/27; C23C16/511; C30B25/10; C30B29/04; H01J37/32; H05H1/46; C01B31/06; (IPC1-7): B01J19/08; B01J19/12; C01B31/06; C23C16/50; C30B29/04; H01L21/205; H01L21/302; H01L21/31; H05H1/30; H05H1/46
Foreign References:
| JPH02107779A | 1990-04-19 | |||
| JPS6054996A | 1985-03-29 | |||
| JPS62298106A | 1987-12-25 | |||
| JPH01149965A | 1989-06-13 | |||
| JPH02129375A | 1990-05-17 |
Other References:
See also references of EP 0503082A4
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