Title:
DEVICE FOR THE LOW-DEFORMATION MOUNTING OF A ROTATIONALLY ASYMMETRIC OPTICAL ELEMENT
Document Type and Number:
WIPO Patent Application WO2003087944
Kind Code:
A3
Abstract:
Disclosed is a device for the low-deformation mounting of a rotationally asymmetric optical element (10), particularly an optical element in a projection lens (1) used in semiconductor lithography. Said optical element (10) is mounted in a frame (21) and is provided with at least three connection surfaces (23) that are positioned perpendicular to each other. Frame-connecting members (22) are disposed in such a way that at least one but no more than two degree/s of translational freedom and at least one but no more than two degree/s of rotational freedom is/are obtained by means of said connecting members (22).
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| JPS6028038 | OPTICAL INFORMATION READER |
| WO/2004/061360 | HEAD MANIPULABLE BINOCULAR MICROSCOPE SUPPORT |
| WO/2019/201843 | METHOD, MEASURING SYSTEM AND LITHOGRAPHY APPARATUS |
Inventors:
WEBER ULRICH (DE)
Application Number:
PCT/EP2003/003561
Publication Date:
April 01, 2004
Filing Date:
April 05, 2003
Export Citation:
Assignee:
ZEISS CARL SMT AG (DE)
WEBER ULRICH (DE)
WEBER ULRICH (DE)
International Classes:
G02B7/00; G02B7/18; G03F7/20; (IPC1-7): G03F7/20; G02B7/00; G02B7/18
Domestic Patent References:
| WO2003081337A2 | 2003-10-02 |
Foreign References:
| FR2555766A1 | 1985-05-31 | |||
| CH371906A | 1963-09-15 | |||
| US6229657B1 | 2001-05-08 | |||
| DE3406907A1 | 1984-10-04 | |||
| US20020085292A1 | 2002-07-04 |
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