Title:
DEVICE FOR MANUFACTURING DILUTED LIQUID, AND METHOD FOR MANUFACTURING DILUTED LIQUID
Document Type and Number:
WIPO Patent Application WO/2018/123193
Kind Code:
A1
Abstract:
A device 10 for manufacturing a diluted liquid has: first piping 11 for supplying a first liquid; a first tank 12a for storing a second liquid; second piping 13 that connects the first tank 12 and the first piping 11; a pressure adjustment unit 18 for adjusting the pressure in the first tank 12a, the pressure adjustment unit 18 sending the second liquid inside the first tank 12a via the second piping 13 and supplying the second liquid to the first piping 11; a control unit 20 that adjusts the addition amount of the second liquid to the first liquid by the pressure adjustment unit 18 so that the concentration of the diluted liquid reaches a prescribed concentration on the basis of the flow rate of the first liquid or the diluted liquid flowing in the first piping 11, and the concentration of the diluted liquid; and a second tank 12b connected in series to the first tank 12a, the second tank 12b temporarily storing the second liquid for replenishing the first tank 12a.
Inventors:
YAMASHITA YUKINARI (JP)
MORINO SHOTA (JP)
YAMANAKA KOJI (JP)
MORINO SHOTA (JP)
YAMANAKA KOJI (JP)
Application Number:
PCT/JP2017/036436
Publication Date:
July 05, 2018
Filing Date:
October 06, 2017
Export Citation:
Assignee:
ORGANO CORP (JP)
International Classes:
B01F15/04; B01F1/00; B01F3/08; B01F5/00; B01J4/00; H01L21/304
Domestic Patent References:
| WO2016042933A1 | 2016-03-24 |
Foreign References:
| JPH1170328A | 1999-03-16 | |||
| JP2015158399A | 2015-09-03 | |||
| JPH10263379A | 1998-10-06 | |||
| JP2005175183A | 2005-06-30 |
Attorney, Agent or Firm:
MIYAZAKI Teruo et al. (JP)
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