Title:
DEVICE AND METHOD FOR FORMING THIN-FILM, AND METHOD OF MANUFACTURING ELECTRONIC COMPONENT USING THE DEVICE
Document Type and Number:
WIPO Patent Application WO/2003/085160
Kind Code:
A1
Abstract:
A thin-film forming device, wherein vacuum tanks having a plurality of film forming chambers are installed on different planes and allowed to communicate with each other through vacuumed exchange chambers, and a substrate is exchanged between the vacuum chambers by a substrate exchange mechanisms installed in the exchange chambers, whereby the number of chambers in the thin-film forming device can be easily increased, an area for installation can be reduced, and a production efficiency can be increased.
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Inventors:
KOSHIKAWA MASATO
MATSUI SATOSHI
MATSUI SATOSHI
Application Number:
PCT/JP2003/004171
Publication Date:
October 16, 2003
Filing Date:
April 01, 2003
Export Citation:
Assignee:
TDK CORP (JP)
International Classes:
C23C14/04; C23C14/50; C23C14/56; C23C16/44; G11B7/26; H01L21/00; H01L21/677; (IPC1-7): C23C14/56; G11B7/26; H01L21/68
Foreign References:
| US6066210A | 2000-05-23 | |||
| JPH08162514A | 1996-06-21 | |||
| JPH03274746A | 1991-12-05 | |||
| JPH1140643A | 1999-02-12 |
Other References:
See also references of EP 1507025A4
Attorney, Agent or Firm:
Okabe, Masao (Fuji Bldg. 2-3, Marunouchi 3-chom, Chiyoda-ku Tokyo, JP)
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