Title:
DEVICE AND METHOD FOR IMPRESSING STRUCTURES IN A SUBSTRATE, IN PARTICULAR IN OPTICAL DATA STORAGE MEDIA, SEMICONDUCTOR STRUCTURES AND MICROSTRUCTURES
Document Type and Number:
WIPO Patent Application WO/2010/004006
Kind Code:
A9
Abstract:
In the manufacture of optical data storage media, data structures are impressed into the substrate (2) in a protective chamber under vacuum. The impression head (4) forms the chamber cover through a flexible seal (20, 21) between the impression head (4) and the support (1) holding the substrate (2) to be impressed. This enables the chamber volume to be reduced and thus low pumping and cycle times as well as good access by the impression head (4). In addition, a self-sealing coupling can be used in the supply canal (101 to 105) between the chamber and the working pressure generating device (100). This makes it possible to quickly exchange the stamper (3) attached to the impression head (4) as a result of the good accessibility of the chamber interior.
Inventors:
REISING MICHAEL (DE)
KEMPF STEFAN (DE)
KEMPF STEFAN (DE)
Application Number:
PCT/EP2009/058758
Publication Date:
June 03, 2010
Filing Date:
July 09, 2009
Export Citation:
Assignee:
SINGULUS TECHNOLOGIES AG (DE)
REISING MICHAEL (DE)
KEMPF STEFAN (DE)
REISING MICHAEL (DE)
KEMPF STEFAN (DE)
International Classes:
B29C59/00; B29C59/02; B29C43/02; B29C43/04; B29C43/36; G03F7/00
Attorney, Agent or Firm:
VOSSIUS & PARTNER (München, DE)
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