Title:
DEVICE AND METHOD FOR OPTICAL PRECISION MEASUREMENT
Document Type and Number:
WIPO Patent Application WO2005108917
Kind Code:
A3
Abstract:
A device and method of optical precision measurement of a component. In the method, an optical probe is provided at a location relative to the component (120) and a source beam directed to the component (122). Deviation is detected (124) and stored in a component characteristic dataset (126). The optical source is moved to other locations relative to the component (128) and additional data acquired (130). The device includes an optical probe (24) providing a source beam (38), a probe stage (22) operable to rotate the optical probe (24) about a ?-axis, a component stage (26) operable to rotate the component (28) about a f-axis, and a position sensitive detector. The probe stage (22) directs the source beam (38) to the component (28), the source beam (38) generates a resultant beam from the component (28), and the position sensitive detector detects the resultant beam.
Inventors:
AMSTEL WILLEM D VAN (NL)
BEEK NIELS A J VAN DER (NL)
BAUMER STEFAN M B (NL)
BEEK NIELS A J VAN DER (NL)
BAUMER STEFAN M B (NL)
Application Number:
PCT/IB2005/051487
Publication Date:
March 30, 2006
Filing Date:
May 06, 2005
Export Citation:
Assignee:
KONINKL PHILIPS ELECTRONICS NV (NL)
PHILIPS CORP (US)
AMSTEL WILLEM D VAN (NL)
BEEK NIELS A J VAN DER (NL)
BAUMER STEFAN M B (NL)
PHILIPS CORP (US)
AMSTEL WILLEM D VAN (NL)
BEEK NIELS A J VAN DER (NL)
BAUMER STEFAN M B (NL)
International Classes:
G01B11/02; G01B11/24; G01B11/255; G01M11/02; (IPC1-7): G01B11/02; G01B11/24; G01M11/02
Foreign References:
| US5644141A | 1997-07-01 | |||
| US5067817A | 1991-11-26 | |||
| US5467192A | 1995-11-14 | |||
| US4609287A | 1986-09-02 |
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