Title:
DEVICE FOR SCANNED DISTANCE DETERMINATION OF AN OBJECT
Document Type and Number:
WIPO Patent Application WO/2019/170703
Kind Code:
A3
Abstract:
The invention relates to a device for the scanned distance determination of an object, comprising: a light source (110, 210, 310, 610) for emitting an optical signal (111, 211, 311) in a temporally varying frequency; an evaluation device for determining a distance of the object (140, 240, 340) on the basis of a measurement signal (121, 221, 321) originating from the optical signal and reflected by the object, and on the basis of a reference signal (122, 222, 322) not reflected by the object; and a dispersive element (131, 231, 331, 620) which causes a frequency-selective angular distribution of the measurement signal (121, 221, 321), thus directing sub-signals generated thereby, at angles differing from one another, to the object (140, 240, 340).
Inventors:
DAVYDENKO VLADIMIR (DE)
HÖLLER FRANK (DE)
ZOTT ANDY (DE)
HÖLLER FRANK (DE)
ZOTT ANDY (DE)
Application Number:
PCT/EP2019/055498
Publication Date:
October 31, 2019
Filing Date:
March 06, 2019
Export Citation:
Assignee:
ZEISS CARL SMT GMBH (DE)
ZEISS CARL AG (DE)
DAVYDENKO VLADIMIR (DE)
HOELLER FRANK (DE)
ZOTT ANDY (DE)
ZEISS CARL AG (DE)
DAVYDENKO VLADIMIR (DE)
HOELLER FRANK (DE)
ZOTT ANDY (DE)
International Classes:
G01S7/481; G01S17/26; G01S17/34; G01S17/42; G01S17/89
Foreign References:
| GB2307369A | 1997-05-21 |
Other References:
RÖMER G R B E ET AL: "Electro-optic and Acousto-optic Laser Beam Scanners", PHYSICS PROCEDIA, ELSEVIER, AMSTERDAM, NL, vol. 56, 9 September 2014 (2014-09-09), pages 29 - 39, XP029053187, ISSN: 1875-3892, DOI: 10.1016/J.PHPRO.2014.08.092
Attorney, Agent or Firm:
FRANK, Hartmut (DE)
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