Title:
DEVICE TRANSFER METHOD, DEVICE TRANSFER MACHINE, TARGET OBJECT TRANSFER METHOD, AND TARGET OBJECT TRANSFER MACHINE
Document Type and Number:
WIPO Patent Application WO/2022/071187
Kind Code:
A1
Abstract:
Proposed are a method and an apparatus for transferring devices arranged on a first substrate to a second substrate by using laser light while correcting positional deviations of the devices. The present invention involves: acquiring actual positional information about devices on the first substrate; performing grouping in accordance with a criterion determined on the basis of an allowable positional deviation amount; correcting, for each group unit, a position of the first substrate such that positions of the devices fall into a range of an allowable positional deviation amount; and applying laser light from the back surface of the first substrate and transferring the devices to the second substrate.
Inventors:
YAMAOKA HIROSHI (JP)
NAKADA SATOKI (JP)
UEMORI NOBUTAKA (JP)
SAITO TAKESHI (JP)
OZAWA SHUSAKU (JP)
SATO SHINICHI (JP)
USAMI TAKETO (JP)
KURATA MASAMI (JP)
SATO MASAHIKO (JP)
ABE TSUKASA (JP)
NOGUCHI TSUYOSHI (JP)
NAKADA SATOKI (JP)
UEMORI NOBUTAKA (JP)
SAITO TAKESHI (JP)
OZAWA SHUSAKU (JP)
SATO SHINICHI (JP)
USAMI TAKETO (JP)
KURATA MASAMI (JP)
SATO MASAHIKO (JP)
ABE TSUKASA (JP)
NOGUCHI TSUYOSHI (JP)
Application Number:
PCT/JP2021/035268
Publication Date:
April 07, 2022
Filing Date:
September 27, 2021
Export Citation:
Assignee:
SHINETSU CHEMICAL CO (JP)
International Classes:
H01L21/52; H01L21/68; H05K13/04
Domestic Patent References:
| WO2020188780A1 | 2020-09-24 |
Foreign References:
| JP2019176129A | 2019-10-10 | |||
| JP2019068055A | 2019-04-25 | |||
| JP2014036060A | 2014-02-24 | |||
| JP2006041500A | 2006-02-09 | |||
| JP2016040854A | 2016-03-24 | |||
| JP2014036060A | 2014-02-24 | |||
| JP2006041500A | 2006-02-09 |
Attorney, Agent or Firm:
YOSHIMIYA Mikio et al. (JP)
Download PDF: