Title:
DIAMOND ELECTRON EMISSION CATHODE, ELECTRON EMISSION SOURCE, ELECTRON MICROSCOPE, AND ELECTRON BEAM EXPOSURE DEVICE
Document Type and Number:
WIPO Patent Application WO/2006/135092
Kind Code:
A1
Abstract:
It is possible to provide an electron emission cathode, an electron emission source having a high-luminance and narrow energy width by using diamond and an electronic device using them. The diamond electron discharge cathode has a monocrystal diamond at least at a part of it. The diamond electron emission cathode has a columnar shape having a sharpened portion at a part of the electron emission section and is formed by at least two types of semiconductor having different electric characteristics. One of the types constituting the semiconductor is an n-type semiconductor containing 2 × 1015 cm-3 of n-type impurities or above and the other type is a p-type semiconductor containing 2 × 1015 cm-3 of p-type impurities or above. The p-type semiconductor is in contact with the n-type semiconductor and negative potential is applied to the n-type semiconductor with respect to the p-type semiconductor so that electrons flow from the n-type semiconductor to the p-type semiconductor by a pair of current introduction terminals, and the n-type semiconductor contains such a component that the electrons flow into the electron emission unit.
Inventors:
NISHIBAYASHI YOSHIKI (JP)
UEDA AKIHIKO (JP)
YAMAMOTO YOSHIYUKI (JP)
IMAI TAKAHIRO (JP)
UEDA AKIHIKO (JP)
YAMAMOTO YOSHIYUKI (JP)
IMAI TAKAHIRO (JP)
Application Number:
PCT/JP2006/312261
Publication Date:
December 21, 2006
Filing Date:
June 19, 2006
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES (JP)
NISHIBAYASHI YOSHIKI (JP)
UEDA AKIHIKO (JP)
YAMAMOTO YOSHIYUKI (JP)
IMAI TAKAHIRO (JP)
NISHIBAYASHI YOSHIKI (JP)
UEDA AKIHIKO (JP)
YAMAMOTO YOSHIYUKI (JP)
IMAI TAKAHIRO (JP)
International Classes:
H01J1/15; H01J37/06; H01J37/305
Foreign References:
| JPH0794077A | 1995-04-07 | |||
| JP2004119018A | 2004-04-15 | |||
| JP2005108634A | 2005-04-21 | |||
| JP2004119019A | 2004-04-15 | |||
| JP2005108637A | 2005-04-21 | |||
| JPS62140332A | 1987-06-23 | |||
| JPH09199001A | 1997-07-31 | |||
| JPH0636680A | 1994-02-10 | |||
| JPH10312735A | 1998-11-24 |
Other References:
NANBA A. ET AL.: "Rin dope Diamond Handotai no Sakusei to Denshi Emitter eno Oyo", SEI TECHNICAL REVIEW, SUMITOMO ELECTRIC INDUSTRIES, LTD., vol. 166, March 2005 (2005-03-01), pages 38 - 44, XP003006925
See also references of EP 1892741A4
See also references of EP 1892741A4
Attorney, Agent or Firm:
Sakai, Masami (13-5 Akasaka 4-chom, Minato-ku Tokyo 52, JP)
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