Title:
DIAPHRAGM VALVE AND MASS FLOW RATE CONTROL DEVICE IN WHICH SAME IS USED
Document Type and Number:
WIPO Patent Application WO/2019/181397
Kind Code:
A1
Abstract:
A diaphragm valve (1) is provided with a diaphragm (2), a tubular valve seat (5), a primary-side flow channel (4) positioned on the outer side of the valve seat, a secondary-side flow channel (3) positioned on the inner side of the valve seat, and a pressing member (6) that presses the diaphragm toward a seating surface to change the valve opening degree, wherein a support member (7), which comes into contact with the diaphragm in at least a partial valve opening degree range from fully open to fully closed and inhibits diaphragm deformation toward the secondary-side flow channel, is disposed in a region between the seating surface and the center of the seating surface. It is thereby possible to prevent shrinking of a gap in the seating surface and cause gas to flow at a high flow rate even when there is a large pressure difference between the two sides of the diaphragm.
Inventors:
GOTO TAKAO (JP)
Application Number:
PCT/JP2019/007453
Publication Date:
September 26, 2019
Filing Date:
February 27, 2019
Export Citation:
Assignee:
HITACHI METALS LTD (JP)
International Classes:
F16K7/16; G05D7/06
Domestic Patent References:
| WO2017217179A1 | 2017-12-21 |
Foreign References:
| US20080142091A1 | 2008-06-19 | |||
| JP2002195443A | 2002-07-10 | |||
| JPH11237921A | 1999-08-31 |
Attorney, Agent or Firm:
PROSPEC PATENT FIRM (JP)
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