DIAZADIENYL COMPOUND, RAW MATERIAL FOR FORMING THIN FILM, METHOD FOR PRODUCING THIN FILM, AND DIAZADIENE COMPOUND

Title:

DIAZADIENYL COMPOUND, RAW MATERIAL FOR FORMING THIN FILM, METHOD FOR PRODUCING THIN FILM, AND DIAZADIENE COMPOUND

Document Type and Number:

WIPO Patent Application WO/2016/143456

Kind Code:

A1

Abstract:

A diazadienyl compound represented by general formula (I). (In the formula, R1 and R2 each independently represent a linear or branched alkyl group having 1-6 carbon atoms, R3 represents a hydrogen atom or a linear or branched alkyl group having 1-6 carbon atoms, M represents a metal atom or silicon atom, and n represents the valence of the metal atom or silicon atom represented by M.)

Inventors:

YOSHINO TOMOHARU (JP)
ENZU MASAKI (JP)
NISHIDA AKIHIRO (JP)
SUGIURA NANA (JP)
SAKURAI ATSUSHI (JP)
OKABE MAKOTO (JP)

Application Number:

PCT/JP2016/054116

Publication Date:

September 15, 2016

Filing Date:

February 12, 2016

Export Citation:

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Assignee:

ADEKA CORP (JP)

International Classes:

C07C251/08; C23C16/18; C07F15/06

Domestic Patent References:

WO2011123675A1	2011-10-06
WO2015065823A1	2015-05-07

Foreign References:

US20130295298A1	2013-11-07
JP2013545755A	2013-12-26
JP2013204048A	2013-10-07
JP2013189696A	2013-09-26

Other References:

J. REINHOLD ET AL.: "CNDO/2-Berechnungen zur elektronischen Struktur von Mono-Diimin-Cobalt (III)-Systemen", Z. PHYS. CHEMIE, vol. 261, no. 5, 1980, Leipzig, pages 989 - 994, XP009505920
SANG BOK KIM ET AL.: "Synthesis of N-Heterocyclic Stannylene (Sn(II)) and Germylene (Ge(II)) and a Sn(II) Amidinate and Their Application as Precursors for Atomic Layer Deposition", CHEMISTRY OF MATERIALS, vol. 26, no. 10, 2014, pages 3065 - 3073, XP055308910
See also references of EP 3266763A4

Attorney, Agent or Firm:

SOGA, Michiharu et al. (JP)
Michiharu Soga (JP)

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