Title:
DIELECTRIC CONSTANT MEASUREMENT DEVICE, DIELECTRIC CONSTANT MEASUREMENT SYSTEM, PLASMA PARAMETER MEASUREMENT DEVICE, AND PLASMA PARAMETER MEASUREMENT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2020/240665
Kind Code:
A1
Abstract:
A dielectric constant measurement device (11) that is for use in a measurement system that includes a transmitter (20) that radiates electromagnetic waves from a transmission antenna (TX) toward a measurement space (SF), a reception antenna (RX) that receives, from the measurement space (SF), scattered waves that correspond to the radiated electromagnetic waves, and a receiver (30) that generates a reception signal (RS) on the basis of an output signal from the reception antenna (RX). The dielectric constant measurement device (11) comprises a scattering characteristics measurement unit (41) that calculates a scattering characteristics measurement (MS) from the reception signal (RS), a scattering characteristics estimation unit (42) that uses a mathematical model to calculate a scattering characteristics estimate (ES), and an updating unit (43) that updates a dielectric constant distribution estimate such that the magnitude of the difference between the measurement (MS) and the estimate (ES) decreases.
Inventors:
SUENOBU HIROSHI (JP)
TANAKA TAI (JP)
TAKIKAWA MICHIO (JP)
TANAKA TAI (JP)
TAKIKAWA MICHIO (JP)
Application Number:
PCT/JP2019/020918
Publication Date:
December 03, 2020
Filing Date:
May 27, 2019
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G01N22/00
Foreign References:
| JP2013125699A | 2013-06-24 | |||
| JP2000266692A | 2000-09-29 | |||
| US20100277184A1 | 2010-11-04 |
Other References:
SHAWN OHLER, GILCHRIST BRIAN, GALLIMORE ALEC: "Nonintrusive Electron Number Density Measurements in the Plume of a 1 kW Arcjet Using a Modern Microwave Interferometer", IEEE TRANSACTIONS ON PLASMA SCIENCE, vol. 23, no. 3, June 1995 (1995-06-01), pages 428 - 435, XP055764663
HIRAOKA, TAKAHIRO ET AL.: "Reconstructing Permittivity Distributions of 3D Scatterers", PROCEEDINGS OF 1997 IEICE SOCIETY CONFERENCE, 1997, pages 38
SUSUMU TAKEDA, TAKASHIGE TSUKISHIMA: "The Microwave Measurements for Plasmas", OYO BUTURI, vol. 36, no. 4, 1967, pages 246 - 256, XP055764668
ISHIDA, KENICHI ET AL.: "Reconstructing 2D Permittivity Distributions by Constructing Equivalent Current Distributions", PROCEEDINGS OF 2005 IEICE SOCIETY CONFERENCE, pages 2
HIRAOKA, TAKAHIRO ET AL.: "Reconstructing Permittivity Distributions of 3D Scatterers", PROCEEDINGS OF 1997 IEICE SOCIETY CONFERENCE, 1997, pages 38
SUSUMU TAKEDA, TAKASHIGE TSUKISHIMA: "The Microwave Measurements for Plasmas", OYO BUTURI, vol. 36, no. 4, 1967, pages 246 - 256, XP055764668
ISHIDA, KENICHI ET AL.: "Reconstructing 2D Permittivity Distributions by Constructing Equivalent Current Distributions", PROCEEDINGS OF 2005 IEICE SOCIETY CONFERENCE, pages 2
Attorney, Agent or Firm:
TAZAWA, Hideaki et al. (JP)
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