Title:
DILUTE SOLUTION PRODUCTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2021/181729
Kind Code:
A1
Abstract:
Provided is a dilute solution production apparatus in which a trace amount of a second liquid containing a conductivity-imparting substance or an oxidation-reduction potential regulating substance is added to a first liquid such as ultrapure water to stably produce a dilute solution having a specified concentration. The dilute solution production apparatus can produce a dilute solution of a second liquid containing at least one of a conductivity-imparting substance and an oxidation-reduction potential regulating substance by adding the second liquid to a first liquid, and is provided with: a first pipe 1 through which the first liquid flows; a pump 6 for adding the second liquid to the inside of the first pipe 1 via a second pipe 5; a degassing pipe 8 which extends from the pump 6; a water quality sensor 11 which is composed of an electric conductivity meter, a resistivity meter or an oxidation-reduction potential meter; and a control device 12 for opening a degassing valve 9 when the water quality detection value in the water quality sensor 11 varies by a predetermined value or more.
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Inventors:
OGAWA YUUICHI (JP)
Application Number:
PCT/JP2020/034828
Publication Date:
September 16, 2021
Filing Date:
September 15, 2020
Export Citation:
Assignee:
KURITA WATER IND LTD (JP)
International Classes:
F04B23/00; C02F1/68; F04B53/06; H01L21/304
Foreign References:
| JP2020025933A | 2020-02-20 | |||
| JP2006297267A | 2006-11-02 | |||
| JPH07227593A | 1995-08-29 | |||
| JP2010162476A | 2010-07-29 | |||
| JP2000126752A | 2000-05-09 |
Attorney, Agent or Firm:
SHIGENO, Tsuyoshi et al. (JP)
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