Title:
DIRECTLY PHOTODEFINABLE POLYMER COMPOSITIONS AND METHODS THEREOF
Document Type and Number:
WIPO Patent Application WO2005076076
Kind Code:
A3
Abstract:
The present invention relates to a directly photoimageable polymer composition (DPPC) and methods for its use in forming microelectronic and optoelectronic devices. Such DPPC encompasses a polymer having at least one norbornene-type repeat unit having a pendant silyl containing radical and at least one norbornene-type repeat unit having an acrylate containing radical.
Inventors:
ELCE EDMUND (US)
RHODES LARRY F (US)
SHICK ROBERT (US)
JAYARAMAN SAIKUMAR (US)
RHODES LARRY F (US)
SHICK ROBERT (US)
JAYARAMAN SAIKUMAR (US)
Application Number:
PCT/US2005/003460
Publication Date:
December 29, 2005
Filing Date:
January 28, 2005
Export Citation:
Assignee:
PROMERUS LLC (US)
ELCE EDMUND (US)
RAVIKIRAN RAMAKRISHNA (US)
RHODES LARRY F (US)
SHICK ROBERT (US)
JAYARAMAN SAIKUMAR (US)
ELCE EDMUND (US)
RAVIKIRAN RAMAKRISHNA (US)
RHODES LARRY F (US)
SHICK ROBERT (US)
JAYARAMAN SAIKUMAR (US)
International Classes:
C08F4/80; C08F32/00; C08F220/40; C08F230/08; C08F232/08; G02B6/122; G02B6/132; G03C1/492; G03C1/494; G03C1/76; G03F7/038; H01L21/301; H01L21/46; H01L21/78; G03F7/075; G03F; (IPC1-7): C08F32/00; G02B6/122; G02B6/132; G03F7/038
Foreign References:
| US20020103317A1 | 2002-08-01 | |||
| US20020052454A1 | 2002-05-02 | |||
| US20020164547A1 | 2002-11-07 |
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