Title:
DISC RESONATOR
Document Type and Number:
WIPO Patent Application WO/2016/010248
Kind Code:
A1
Abstract:
The present invention relates to a disc resonator that has applications to a bio-sensor, a gas sensor, a pressure sensor, a frequency filter, and the like. Specifically, the disc resonator comprises: a circular disc that has a first electrode to which bias power is input; an electrode part that forms a capacitive gap together with the edge of the circular disc, where the size of the capacitive gap is changed based on the magnitude of an electromagnetic force; and a restriction part that restricts the electrode part from further moving toward the circular disc such that the size of the capacitive gap, which is changed by the electromagnetic force, is determined. According to the present invention, the size of the capacitive gap formed between the circular disc and the electrode part is reduced by the restriction part while the resonator is operating, so that the gap can be minimized during the operation although the gap is formed to be larger when the resonator is manufactured, thereby facilitating signal detection. Therefore, it is possible to form a gap at a scale of hundreds of nanometers with a lower cost and a simpler structure than in the related art.
Inventors:
CHOI HAE JIN (KR)
Application Number:
PCT/KR2015/005040
Publication Date:
January 21, 2016
Filing Date:
May 20, 2015
Export Citation:
Assignee:
UNIV CHUNG ANG IND (KR)
International Classes:
G01N33/15
Foreign References:
| US7551043B2 | 2009-06-23 | |||
| JP2008107336A | 2008-05-08 | |||
| JP2007152501A | 2007-06-21 | |||
| KR20050101313A | 2005-10-21 |
Other References:
RYU, JE JUN: "Development of Radial Contour-Mode Disk Resonator Based Immunosensor", THESIS OF CHUNGANG UNIVERSITY, February 2013 (2013-02-01)
Attorney, Agent or Firm:
IPS PATENT FIRM (KR)
특허법인 아이피에스 (KR)
특허법인 아이피에스 (KR)
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