Title:
DISCHARGE ELECTRODE, METHOD FOR PRODUCING ANODE, AND METHOD FOR PRODUCING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/218548
Kind Code:
A1
Abstract:
The present invention provides a discharge electrode which is used in a gas laser apparatus for exciting a fluorine-containing laser gas by means of electric discharge, and which comprises a cathode and an anode. The anode comprises: an electrode base material which is arranged so as to face the cathode and contains a metal; and a coating layer which covers a part of a lateral surface of the electrode base material, the lateral surface being parallel to the longitudinal direction of the electrode base material, and which contains an insulating material. The coating layer comprises: a first portion that covers a first region in the lateral surface; and a second portion that is thicker than the first portion and covers a second region in the lateral surface, the second region being positioned farther from the cathode than the first region in a discharge direction that is perpendicular to the longitudinal direction.
Inventors:
HORI TSUKASA (JP)
KATO MASAHIDE (JP)
KATO MASAHIDE (JP)
Application Number:
PCT/JP2022/019914
Publication Date:
November 16, 2023
Filing Date:
May 11, 2022
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/038
Foreign References:
| JP2007500942A | 2007-01-18 | |||
| JP2003152249A | 2003-05-23 | |||
| JP2009200520A | 2009-09-03 | |||
| JP2004179272A | 2004-06-24 | |||
| US20070002918A1 | 2007-01-04 | |||
| US20100239748A1 | 2010-09-23 |
Attorney, Agent or Firm:
HOSAKA Nobuhisa (JP)
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