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Title:
DISCHARGE PLASMA GENERATION AUXILIARY DEVICE
Document Type and Number:
WIPO Patent Application WO/2007/023945
Kind Code:
A1
Abstract:
A discharge plasma device includes a discharge tube (A). The discharge tube (A) has a hermetic vessel (1) filled with a discharge gas. The hermetic device (1) contains a pair of discharge electrodes (2a, 2b), an electron source (3) for supplying electrons into the discharge gas, and a grid electrode (4) opposing the electron emitting surface of the electron source (3). The discharge plasma device includes power source (5) for applying voltage across the discharge electrodes (2a, 2b), discharge detection means (6) for detecting a discharge state of the discharge tube (A), and control means (7) for controlling the potential of the electron source (3) so as to suppress collision of plus ions to the electron source (3) when discharge start of the discharge tube (A) is detected by the discharge detection means (6). The grid electrode (4) has an opening for passing electrons emitted from the electron source (3). The electron source (3) and the grid electrode (4) constitute a discharge plasma generation auxiliary device.

Inventors:
HATAI TAKASHI (JP)
AIZAWA KOICHI (JP)
ICHIHARA TSUTOMU (JP)
Application Number:
PCT/JP2006/316729
Publication Date:
March 01, 2007
Filing Date:
August 25, 2006
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC WORKS LTD (JP)
HATAI TAKASHI (JP)
AIZAWA KOICHI (JP)
ICHIHARA TSUTOMU (JP)
International Classes:
H01J61/54; H05B41/22
Foreign References:
JP2006164648A2006-06-22
JP2006179202A2006-07-06
JP2002150944A2002-05-24
JPS63150837A1988-06-23
JPH04286855A1992-10-12
JPH11329213A1999-11-30
JP2005084491A2005-03-31
JPH11311975A1999-11-09
JP2002298778A2002-10-11
JPH08222158A1996-08-30
JPS53121454A1978-10-23
JPH09274845A1997-10-21
JPH0473837A1992-03-09
JP2004207066A2004-07-22
JPH1131452A1999-02-02
JP2004200896A2004-07-15
JPH07235257A1995-09-05
JP2002203471A2002-07-19
JP2004152591A2004-05-27
Attorney, Agent or Firm:
KAWAMIYA, Osamu et al. (IMP Building 3-7, Shiromi 1-chome, Chuo-k, Osaka-shi Osaka 01, JP)
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