Title:
DISPLAY PANEL AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2021/035848
Kind Code:
A1
Abstract:
A display panel (100) and preparation method therefor. A protective layer (103) of a first contact area (1021) and a second contact area (1023) is quantitatively etched such that a first through hole (1081) and a second through hole (1082) contact a surface of an active layer (102), and a source/drain metal layer (109) can be connected to the active layer (102) by means of the first through hole (1081) and the second through hole (1082). No HFC is used to clean the protective layer (103), thereby effectively preventing a first capacitor electrode (105) and a second capacitor electrode (107) from being corroded by HF, so as to obtain stable TFT electrical parameters.
Inventors:
HUANG YUTIAN (CN)
SONG HUI (CN)
SONG HUI (CN)
Application Number:
PCT/CN2019/107273
Publication Date:
March 04, 2021
Filing Date:
September 23, 2019
Export Citation:
Assignee:
WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD (CN)
International Classes:
H01L27/32
Foreign References:
| CN109686742A | 2019-04-26 | |||
| CN107146771A | 2017-09-08 | |||
| CN109065583A | 2018-12-21 | |||
| CN108598090A | 2018-09-28 | |||
| CN107425044A | 2017-12-01 | |||
| US20100314700A1 | 2010-12-16 |
Attorney, Agent or Firm:
ESSEN PATENT & TRADEMARK AGENCY (CN)
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