Title:
DOUBLE-SIDED SUPERLENS PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2024/055712
Kind Code:
A1
Abstract:
The present invention provides a double-sided superlens processing method. The method comprises: providing a first structural layer on a first surface of a substrate, and performing a first photolithography operation on the first structural layer to obtain a first nanostructure and an alignment identification mark; providing a second structural layer on a second surface of the substrate; manufacturing an alignment window at the position of the second structural layer corresponding to the alignment identification mark; and performing alignment on the basis of the alignment identification mark, and performing a second photolithography operation on the second structural layer to obtain a second nanostructure. According to the double-sided superlens processing method provided in the embodiments of the present invention, on the basis of the alignment identification mark obtained from the first photolithography operation and the alignment window at the position of the second structural layer corresponding to the alignment identification mark, the alignment identification mark is identified through the alignment window, alignment is performed, and the second photolithography operation is performed. The method breaks the accuracy limits of conventional backside overlay processes, so that the alignment accuracy in the process of processing the first nanostructure and the second nanostructure is increased to the accuracy of a photolithography machine.
Inventors:
ZHU JIAN (CN)
HAO CHENGLONG (CN)
TAN FENGZE (CN)
HAO CHENGLONG (CN)
TAN FENGZE (CN)
Application Number:
PCT/CN2023/104802
Publication Date:
March 21, 2024
Filing Date:
June 30, 2023
Export Citation:
Assignee:
SHENZHEN METALENX TECH CO LTD (CN)
International Classes:
G03F7/20; G02B3/00; G03F9/00
Foreign References:
| CN113608411A | 2021-11-05 | |||
| CN106842815A | 2017-06-13 | |||
| CN112558437A | 2021-03-26 | |||
| EP1531366A2 | 2005-05-18 |
Attorney, Agent or Firm:
FAIRSKY LAW OFFICE (CN)
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