Title:
DRAWING METHOD AND DRAWING DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/136782
Kind Code:
A1
Abstract:
A height information Dh is acquired (step S205), which represents the height of each of a plurality of alignment marks AM (reference points) provided in a chip region Rc, and, from the height information Dh, a value representing the slope in the chip region Rc (alignment mark AM height difference ΔH) is calculated (step S206). Then, whether executing drawing in the chip region Rc is appropriate or not is determined based on the focal depth and the result of the calculation of the value ΔH representing the slope in the drawing region (step S208).
Inventors:
NAKAI KAZUHIRO (JP)
Application Number:
PCT/JP2014/080451
Publication Date:
September 17, 2015
Filing Date:
November 18, 2014
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/027; G03F9/02
Domestic Patent References:
| WO2005122218A1 | 2005-12-22 |
Foreign References:
| JP2011086777A | 2011-04-28 | |||
| JP2005032777A | 2005-02-03 | |||
| JP2000323404A | 2000-11-24 | |||
| JP2006337999A | 2006-12-14 | |||
| JPH11329953A | 1999-11-30 | |||
| JP2014032278A | 2014-02-20 |
Attorney, Agent or Firm:
FURIKADO, Shoichi et al. (JP)
Swing angle Shoichi (JP)
Swing angle Shoichi (JP)
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