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Title:
DRIVE ELEMENT
Document Type and Number:
WIPO Patent Application WO/2022/209404
Kind Code:
A1
Abstract:
This drive element (1) comprises a fixed part, a drive unit that is aligned on the side of the fixed part and that is linked to the fixed part, and a moveable part that is driven by the drive unit. A lower electrode (111), a piezoelectric layer (112), and an upper electrode (114) are formed in order on an upper surface region of the fixed part and the drive unit. Furthermore, in a wiring region (A1) on the fixed-part side of the upper surface region, a low dielectric layer (115) including at least one element that forms the piezoelectric layer (112) is formed on the upper surface of the piezoelectric layer (112).

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Inventors:
OKAMOTO SHOJI
TAKAYAMA RYOUICHI
KATAYAMA TAKUMA
Application Number:
PCT/JP2022/006561
Publication Date:
October 06, 2022
Filing Date:
February 18, 2022
Export Citation:
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Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
B81B3/00; G02B26/08; G02B26/10; H01L41/113; H01L41/187; H03H9/24
Foreign References:
JP2006199507A2006-08-03
JP2016057547A2016-04-21
JP5903667B22016-04-13
JP2004102150A2004-04-02
JP2014134642A2014-07-24
Attorney, Agent or Firm:
SHIBANO, Masanori et al. (JP)
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