Title:
DRIVE METHOD FOR PIEZOELECTRIC ACTUATOR, DRIVE CIRCUIT FOR PIEZOELECTRIC ACTUATOR, AND DRIVE SYSTEM FOR PIEZOELECTRIC ACTUATOR
Document Type and Number:
WIPO Patent Application WO/2021/100438
Kind Code:
A1
Abstract:
The present invention is a drive method for a piezoelectric actuator, a drive circuit for a piezoelectric actuator, and a drive system for a piezoelectric actuator that can vibrate a piezoelectric element in a maximum amplitude state. The drive circuit for a piezoelectric actuator comprises: an acquisition unit that acquires operation information relating to the operation of the piezoelectric element in a portion of a period in one cycle of a drive cycle in which the piezoelectric element is driven; and a control unit that performs feedback control of the drive parameters for driving the piezoelectric element on the basis of the operation information.
Inventors:
ABE HIRONOBU (JP)
SATO MASAHIRO (JP)
TAKENAKA HIROYA (JP)
SATO MASAHIRO (JP)
TAKENAKA HIROYA (JP)
Application Number:
PCT/JP2020/040714
Publication Date:
May 27, 2021
Filing Date:
October 29, 2020
Export Citation:
Assignee:
SONY CORP (JP)
International Classes:
H02N2/06; B06B1/06; F04B9/00; F04B43/04; H01L41/04; H01L41/09
Foreign References:
| JP2011223843A | 2011-11-04 | |||
| JP2017131052A | 2017-07-27 | |||
| JP2002362723A | 2002-12-18 | |||
| JP2007320691A | 2007-12-13 | |||
| JP2007533902A | 2007-11-22 | |||
| JPH06117377A | 1994-04-26 | |||
| JP2017183515A | 2017-10-05 | |||
| US20120315157A1 | 2012-12-13 |
Attorney, Agent or Firm:
TANAKA Hidetetsu et al. (JP)
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