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Title:
DRIVE UNIT AND MOTOR DEVICE USING THE SAME
Document Type and Number:
WIPO Patent Application WO/1988/004492
Kind Code:
A1
Abstract:
A motor device using one or a plurality of drive units each being comprised of a plurality of laminated piezoelectric actuators (52a, 52b, 54a, 54b, 56a, 56b, 58a, 58b, 60a, 60b, 62a, 62b, 64a, 64b, 66a, 66b) and displacement coupling means (44, 46, 48, 50) that couple displacements of these actuators and produce them at dissimilar angles. The plurality of actuators of the drive unit are driven on AC signals that are in synchronism with each other, so that a desired curvilinear motion is produced at the motion output terminals. The output of the drive unit is transmitted to a moving member (34) via a non-contact motion transmission means made up of magnetic poles (Q11, ......, Q1m; Q21, ......, Q2m; Q31, ......, Q3m; Q41, ......, Q4m; m11, ......, m1n; m21, ......, m2n; m31, ......, m3n; m41, ......, m4n), thus realizing a motor device which is highly reliable and which has resolution in the order of submicrons.

Inventors:
MURATA TAKEO (JP)
Application Number:
PCT/JP1987/000576
Publication Date:
June 16, 1988
Filing Date:
July 31, 1987
Export Citation:
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Assignee:
JGC CORP (JP)
International Classes:
H01L41/09; (IPC1-7): H02N2/00
Foreign References:
JPS57170094A1982-10-20
Other References:
See also references of EP 0292562A4
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