DROPLET DISCHARGE DEVICE AND CALCULATION METHOD

Title:

DROPLET DISCHARGE DEVICE AND CALCULATION METHOD

Document Type and Number:

WIPO Patent Application WO/2018/163380

Kind Code:

A1

Abstract:

This droplet discharge device may be provided with: a droplet discharge unit that discharges at intervals, through an opening of a nozzle connected to a tank, a droplet of a target material stored in the tank; a speed sensor that measures the speed of the droplet discharged from the droplet discharge unit; and a calculation unit that calculates, on the basis of the cross-sectional area of the opening of the nozzle and the speed of the droplet, the volume of the target material consumed per unit time.

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Inventors:

WAKANA KATSUHIKO (JP)

Application Number:

PCT/JP2017/009593

Publication Date:

September 13, 2018

Filing Date:

March 09, 2017

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Assignee:

GIGAPHOTON INC (JP)

International Classes:

G03F7/20; B41J2/01; H05G2/00

Domestic Patent References:

WO2014189055A1

2014-11-27

Foreign References:

JP2014175474A	2014-09-22
JPS62174163A	1987-07-30
JPS5541239A	1980-03-24
JP2007266234A	2007-10-11

Attorney, Agent or Firm:

MORIMURA Yasuo (JP)

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