Title:
DRYING APPARATUS AND METHOD BASED ON SUPERCRITICAL FLUID
Document Type and Number:
WIPO Patent Application WO/2023/015417
Kind Code:
A1
Abstract:
A drying apparatus based on a supercritical fluid, the apparatus comprising: an upper cover (1); a base (2) arranged below the upper cover (1) and suitable for moving relative to the upper cover (1) in a vertical direction, so as to close to form a pressure-resistant closed chamber (120); a substrate tray (3) arranged on the base (2) and used for bearing a substrate (w); a first fluid supply tube (4) arranged on the top wall of the upper cover (1) and used to supply a supercritical fluid to the interior of the closed chamber (120), such that the closed chamber (120) reaches a supercritical state from an atmospheric pressure state; a fluid disturbance plate (5) arranged below the first fluid supply tube (4); a second fluid supply tube (6) arranged on a first side wall of the upper cover (1) and used to supply the supercritical fluid to the interior of the closed chamber (120); and a fluid discharge tube (7) arranged on a second side wall of the upper cover (1). The inner space of the closed chamber (120) can be minimized by using the drying apparatus, thereby reducing the usage amount of the supercritical fluid, and reducing the usage costs.
Inventors:
WANG HUI (CN)
JIA SHENA (CN)
TAO XIAOFENG (CN)
HE BIN (CN)
ZHAO XIN (CN)
SUN YINGNAN (CN)
LI BIN (CN)
WANG JUN (CN)
WANG JIAN (CN)
CHEN FUPING (CN)
ZHANG XIAOYAN (CN)
CHU ZHENMING (CN)
WANG DEYUN (CN)
JIA SHENA (CN)
TAO XIAOFENG (CN)
HE BIN (CN)
ZHAO XIN (CN)
SUN YINGNAN (CN)
LI BIN (CN)
WANG JUN (CN)
WANG JIAN (CN)
CHEN FUPING (CN)
ZHANG XIAOYAN (CN)
CHU ZHENMING (CN)
WANG DEYUN (CN)
Application Number:
PCT/CN2021/111600
Publication Date:
February 16, 2023
Filing Date:
August 09, 2021
Export Citation:
Assignee:
ACM RES SHANGHAI INC (CN)
International Classes:
B08B3/00; H01L21/67; B08B3/04; H01L21/00; H01L21/02; H01L21/304
Domestic Patent References:
| WO2020195474A1 | 2020-10-01 |
Foreign References:
| US20110214694A1 | 2011-09-08 | |||
| US20200365437A1 | 2020-11-19 | |||
| US20120073599A1 | 2012-03-29 | |||
| CN1497667A | 2004-05-19 | |||
| CN108269752A | 2018-07-10 | |||
| CN107881032A | 2018-04-06 | |||
| JP2005072568A | 2005-03-17 | |||
| CN200710108454A | 2007-06-14 | |||
| CN201711066490A | 2017-11-02 |
Attorney, Agent or Firm:
SHANGHAI PATENT & TRADEMARK LAW OFFICE, LLC (CN)
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